MA12
MA12
Manual Mask aligner for up to 300mm wafers and substrates
Process flexibility:
• Bridge tool supporting 200mm, 300mm wafers and 300mm square substrates
• MO Exposure Optics with exchangeable aperture plates
• Interchangeable wavelength filter
• Top Side, Bottom Side and Infrared Alignment
Low cost of ownership:
• Cost efficient 300mm exposure tool
• High intensity exposure optics
• Easy service ability and user friendliness
