SUSS MicroTec’s DSC500 projection lithography platform is based on Tamarack Scientific’s proprietary projection lithography technology. The system is designed for lowest cost of ownership in the field of projection lithography for large substrate and panel size applications.

With a full-field mask and a broadband projection lens the scanner can print up to 450 mm x 500 mm substrates in a single exposure. It can also be equipped to process wafers up to 450 mm in a manual load configuration.

Standard On-Axis Alignment enables the user to view and overlay fiducials on the mask and substrate to perform a very accurate through the projection lens alignment that achieves an alignment accuracy of <±1μm.

The DSC500 platform can be configured as a semi-automatic or fully automatic setup. The semi-automatic DSC500 is well suited for R&D and pilot line production.

Full automation, including automated substrate handling and mask handling minimizes operator intervention and guarantees the high- est productivity. The system also supports SECS/GEM factory control interface over TCP/IP.

AND FLEXIBLE DISPLAYS, ADVANCED SUBSTRATES AND 450MM WAFERS